Installation of Clean Rooms for Physics Laboratories at Royal Holloway, University of London

The Physics Department of Royal Holloway, University of London have won a grant from the Engineering and Physical Sciences Research Council (EPSRC) for the purchase of an Electron Beam Lithography Tool which will be located within a new 300 m2 specialist multi-room cleanroom environment to be constructed in an existing building.

The facility will underpin the UK Centre for Superconducting Quantum Systems.

The new cleanroom facility will provide a reliable ISO Class 5 environment for electronic nanofabrication of devices for research and small-scale production.

The new facility will provide, in part of the space, the necessary environmental conditions for the EBL tool, including precision temperature control, control of electromagnetic interference and control of vibration.

The new facility will also re-house existing supporting equipment of the type normally used in electronic nanofabrication and wafer processing, including wet and dry wafer processing and film deposition tools.

As part of the installation, all specialist services will be provided to meet the requirements for both the cleanroom environment and the nanofabrication equipment, including the installation of process gas supplies, vacuum, monitoring equipment, HVAC and similar.

The successful contractor will have demonstrable experience in delivering cleanrooms for nano-science and electronics to ISO Classification 5 and will have demonstrable experience in precision temperature control and the control of vibration, sources of magnetic interference and UV light.

The new facility will be located on the lower ground floor of the Bedford library (building 27), within the University's South Campus in Egham, Surrey (TW20 0EX) and in addition to the EBC, will also consolidate existing facilities which currently located in another building alongside the new equipment.

The University is seeking to appoint a suitable contractor to carry out this important, specialist installation which must be completed and operational by no later than 19th January 2018.