QUB/2306/22 Supply, Delivery, Installation and Commissioning of a Physical Vapour Deposition (PVD) Thin Film Deposition Cluster - Request for Information
The submission route named on the official notice.
Queen’s University Belfast ("Queen’s") seeks to engage with providers of Thin Film Deposition Cluster Tools for the UKRI Smart Nano NI Project activity being delivered by Queen’s.
At present we have a technical requirement for an instrument that includes;- 1.
A wafer handling system/robot (150mm or 200mm) and load-lock that can provide to a multiple of process chambers (options for single wafer or cassette loading).- 2.
A Physical Vapour Deposition (PVD) process module 1 - with up to eight (8) sources capable of coverage of 150 mm wafer with high uniformity.- 3.
A PVD process module 2 - with up to six (6) sources capable of coverage of 150 mm wafer with high uniformity.- 4.
An Atomic layer Deposition (ALD) module for oxide deposition capable of coverage of 150 mm wafers with high uniformity. - 5.
A glove-box / transfer-module for the removal/packaging, under controlled conditions, for 150mm wafers.
What the supplier must deliver
A wafer handling system/robot (150mm or 200mm)
A wafer handling system/robot (150mm or 200mm) and load-lock that can provide to a multiple of process chambers (options for single wafer or cassette loading).- 2.
With up to eight (8) sources capable
with up to eight (8) sources capable of coverage of 150 mm wafer with high uniformity.- 3.
With up to six (6) sources capable
with up to six (6) sources capable of coverage of 150 mm wafer with high uniformity.- 4.
An Atomic layer Deposition (ALD) module
An Atomic layer Deposition (ALD) module for oxide deposition capable of coverage of 150 mm wafers with high uniformity.
Derived from the notice text — always confirm against the original documents.
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- OCID
- ocds-h6vhtk-036293
- Stage
- planning · Planning
- Source
- Find a Tender
- Buyer ref
- 023653-2022
Contains public sector information licensed under the Open Government Licence v3.0. Source data © Crown copyright.
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